Small cameras wanted more megapixels without bigger sensors, but shrinking pixels made each one collect less light. The obvious answer was better signal processing; the harder answer was changing the physical path of photons.

Sony's June 2008 announcement said its prototype back-illuminated CMOS sensor used 1.75 micrometer pixels, five effective megapixels and 60 fps operation. Compared with a same-pixel-size front-illuminated Sony sensor, it reported nearly twofold sensitivity and a +8 dB signal-to-noise improvement.

The clever move was structural. By illuminating the backside of the silicon substrate, Sony reduced the shading caused by front-side metal wiring and transistors. It then handled the usual backside penalties with a new photodiode, optimized on-chip lens and high-precision alignment.

In 2010 Sony said Exmor R had been in Sony digital imaging products since 2009 and announced mobile-phone sensors using the same back-illuminated idea.

Let light enter from the back

It attacked the optical bottleneck before the signal became noisy data.

The design preserved CMOS advantages such as low power and high-speed readout.

Backside entry made small pixels more useful instead of merely smaller.

Solving dark current, defects and color mixing turned a lab structure into a manufacturable camera part.

When miniaturization makes every component fight for the same surface, turn the stack into a three-dimensional design problem.

Back-illuminated CMOS became standard in premium phone and camera sensors. Sony's Exmor R branding made a buried semiconductor stack visible to consumers through better low-light photos.

FOLLOW THE EVIDENCE

The sources

  1. Sony develops back-illuminated CMOS image sensor, realizing high picture quality, nearly twofold sensitivity and low noise sony.com
  2. Sony commercializes world's first 16.41 Megapixel Exmor R back-illuminated CMOS image sensors for mobile phones sony.com
  3. A 1/2.3 inch 10.3Mpixel 50frame/s back-illuminated CMOS image sensor doi.org